Thermo Scientific™
SURF-CAL™ Particle Size Standards
Simplify the preparation of calibration wafers with these particle size standards.
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| Catalog Number | Concentration | Diameter (Metric) |
|---|---|---|
| PD-047 | 3 x 108 particles/mL | 0.047 μm |
| PD-047B | 1 x 10¹° particles/mL | 0.047 μm |
| PD-064 | 3 x 108 particles/mL | 0.064 μm |
| PD-064B | 1 x 10¹° particles/mL | 0.064 μm |
| PD-083 | 3 x 108 particles/mL | 0.083 μm |
| PD-083B | 1 x 10¹° particles/mL | 0.083 μm |
| PD-092 | 3 x 108 particles/mL | 0.092 μm |
| PD-092B | 1 x 10¹° particles/mL | 0.092 μm |
| PD-100 | 3 x 108 particles/mL | 0.100 μm |
| PD-100B | 1 x 10¹° particles/mL | 0.100 μm |
| PD1100 | 3 x 108 particles/mL | 1.112 μm |
| PD1100B | 1 x 10¹° particles/mL | 1.112 μm |
| PD-125 | 3 x 108 particles/mL | 0.126 μm |
| PD-125B | 1 x 10¹° particles/mL | 0.126 μm |
| PD-155 | 3 x 108 particles/mL | 0.155 μm |
| PD-155B | 1 x 10¹° particles/mL | 0.155 μm |
| PD-200 | 3 x 108 particles/mL | 0.202 μm |
| PD2000 | 3 x 108 particles/mL | 2.01 μm |
| PD-200B | 1 x 10¹° particles/mL | 0.202 μm |
| PD-204 | 3 x 108 particles/mL | 0.204 μm |
| PD-204B | 1 x 10¹° particles/mL | 0.204 μm |
| PD-215 | 3 x 108 particles/mL | 0.220 μm |
| PD-215B | 1 x 10¹° particles/mL | 0.220 μm |
| PD3000 | 3 x 108 particles/mL | 3.04 μm |
| PD-305 | 3 x 108 particles/mL | 0.304 μm |
| PD-305B | 1 x 10¹° particles/mL | 0.304 μm |
| PD-365 | 3 x 108 particles/mL | 0.360 μm |
| PD-365B | 1 x 10¹° particles/mL | 0.360 μm |
| PD-500 | 3 x 108 particles/mL | 0.498 μm |
| PD-500B | 1 x 10¹° particles/mL | 0.498 μm |
| PD-800 | 3 x 108 particles/mL | 0.809 μm |
| PD-800B | 1 x 10¹° particles/mL | 0.809 μm |
| PD-802 | 3 x 108 particles/mL | 0.802 μm |
| PD-802B | 1 x 10¹° particles/mL | 0.802 μm |
Catalog number PD-047
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Concentration:
3 x 108 particles/mL
Diameter (Metric):
0.047 μm
Simplify the preparation of calibration wafers with Thermo Scientific™ SURF-CAL™ Particle Size Standards, for calibration and maintenance of Scanning Surface Inspection Systems (SSIS). Available particle sizes correspond to the calibration point sizes required by instrument manufacturers.
Thermo Fisher Scientific™, along with the Semiconductor Industry and SEMI, have established specific particle sizes to be used when calibrating Scanning Surface Inspection Systems. Working with instrument manufacturers, we created the SURF-CAL™ product line to meet SEMI standard guidelines.
- Available sizes are considered to be critical sizing nodes as defined by the International Technology Roadmap for Semiconductors (ITRS).
- By depositing SURF-CAL™ NIST™ traceable polystyrene latex spheres (PSL) on specially selected wafers, you can perform periodic calibration checks and compare your scanner with scanners at other locations.
- You can also assess the performance of your SSIS at critical stages in the manufacturing process.
- All products are suspended in deionized, filtered water in 50mL bottles at a concentration of 3 × 108 particles per mL.
Note:
Products PD1100 and smaller are also available at 1010 particles per mL for applications using the aid of a Differential Mobility Analyzer (DMA) or other size exclusionary techniques.
Specifications
AdditiveNone
Concentration3 x 108 particles/mL
ContentsPolystyrene microspheres in deionized, filtered water
DescriptionParticles for calibration and maintenance of Scanning Surface Inspection Systems (SSIS)
ColorWhite or Colorless
For Use With (Application)SSIS Calibration and Maintenance
MaterialPolystyrene
Product TypeSize Standard Particles
IncludesCertificate of Calibration and Traceability to NIST
Particle Density1.05g/cm³
Quantity50 mL
Refractive Index1.59 at 589nm (25°C)
Size Distribution0.004µm
StabilityProduct stable for a minimum of 12 months
Diameter (Metric)0.047 μm
Unit SizeEach
Contents & Storage
Unless otherwise stated, refrigerate (2° to 8°C) product when not in use but do not freeze. Store upright and keep bottle tightly sealed. Mix product with gentle inversion by hand or vortex mixer.