ESD Semiconductor Qualification
Every electrostatic discharge (ESD) control plan is required to identify devices that are sensitive to ESD. We offer a complete suite of test systems to help with your device qualification requirements.
The Thermo Scientific Pegasus ESD Test System is a low parasitic 2-pin tester used to characterize protection structures at wafer, die, or package level. The Pegasus can also be used as part of your device qualification routine, providing supplemental data to the results gathered when using an automated (relay based) high pin count ESD test system. Testing is available to the latest industry standards for Human Body Model (HBM), Machine Model (MM) waveforms, as well as offering a true System Level (150pF/330Ω) IEC like waveform based on the EOS/ESD Association’s Human Metal model (HMM). The system’s pulse source design and pulse source delivery method ensures waveform fidelity directly at the device under test, not only at the generator output. Current waveforms can be automatically captured and analyzed for each ESD event. In addition, Voltage waveforms can be captured and used to determine the turn-on level of protection structures. They can also be used as a means of failure determination, as the voltage waveforms will generally show changes after ESD events.
Fully compliant testing
Fully compliant, Human Body Model (HBM) and Machine Model (MM) testing per the latest industry standards.
System level ESD
True system level ESD 150pF/330Ω network (not a 50Ω emulator) available to meet the proposed Human Metal Model (HMM) requirements.
Wafer probes
2 pin connection via wafer probes to any device in a package, die, or wafer.
Failure analysis
Pre- and post-curve trace measurements for comparative failure analysis.
Oscilloscope interface
Oscilloscope interface (GPIB, USB or TCP/IP) with automatic internal attenuation.
Storage
Storage of all waveforms with automatic analysis using the latest industry standards.
ESD waveform generators
Pods (ESD waveform generators) can easily be installed on a prober station.
Supply controls
Bias supply controls for pre- and post-Idd measurements.
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ZAP Voltage |
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ZAP Voltage Resolution |
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Low vacuum mode |
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ESD Semiconductor Qualification
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ESD Compliance Testing
Electrostatic discharge (ESD) can damage small features and structures in semiconductors and integrated circuits. We offer a comprehensive suite of test equipment which verifies that your devices meet targeted ESD compliance standards.
ESD Compliance Testing
Electrostatic discharge (ESD) can damage small features and structures in semiconductors and integrated circuits. We offer a comprehensive suite of test equipment which verifies that your devices meet targeted ESD compliance standards.
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Electron microscopy services for
semiconductors
To ensure optimal system performance, we provide you access to a world-class network of field service experts, technical support, and certified spare parts.
Electron microscopy support and resources
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