">

Automated STEM-EDS Metrology and Characterization of DRAM Capacitors

On-Demand Webinar

Capacitors play an essential role in dynamic random-access memory (DRAM) and logic device applications. Measuring the critical dimension (CD) and compositional distribution of the capacitor structure is becoming more challenging due to the increasing scaling and three-dimensional complexity.

Register below to view our on-demand webinar:


I would like to:

Tell us more about your interest timeline:

Email Permissions

To comply with your preferences, we need to confirm permission to send you communications by email. Personal information provided will be used in accordance with our Privacy Policy.

This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.


In this webinar, we present a scanning transmission electron microscopy (STEM) based, energy dispersive X-ray spectroscopy (EDS) metrology method enabled by the Thermo Scientific Metrios 6 (S)TEM and its new Ultra-X EDS detector. The Ultra-X EDS detector provides a 4.45 srad solid angle, delivering at least 2x greater data collection efficiency than the previous generations of detectors. High-quality analytical information and fast EDS data collection is provided through improved sensitivity, efficiency, and throughput capabilities.

 

We present a study on the interfacial diffusion and distribution of high-k material within DRAM capacitors during STEM-EDS data collection. You'll also discover the effect of the electron beam and its impact on metrology characterization. The webinar conclude with a discussion of strategies to optimize EDS data collection with minimal beam damage, high-throughput, and reproducible metrology.

About the speaker

Karthik Gnanasekaran, TEM Applications Engineer

Dr. Karthik Gnanasekaran is a TEM Application Development Engineer for semiconductor applications at Thermo Fisher Scientific. Prior to joining Thermo Fisher Scientific, Karthik was a researcher at Northwestern University, Evanston, IL, USA, developing in situ TEM and TEM automation methods. Karthik received his Ph.D. in Chemistry from Eindhoven University of Technology, the Netherlands.

">